Flexible and affordable
- Applicable for non-critical semiconductor, thin film applications and industrial use
- Adjustable tap settings for wide tune ranges
- Compact design
- Compatible with Comet's cito Plus RF generator
- Best price-performance ratio
Target market segments
- Solar
- R&D
- Semiconductor design and development
- Universities - Industrial coatings
Power | Frequency | Cooling | RF output | ||
| W | 13 MHz | 27 MHz | 40 MHz | ||
| 1000 | X | X | X | Air | 7/16 DIN, MC10, Mount Bar |
| 2000 | X | Air | MC10, Mount Bar | ||
| 3000 | X | Air | MC10, Mount Bar | ||
| 5000 | X | Water | MC10, Mount Bar | ||
Matched performance
Build your RF delivery system by combining an AGS Impedance Matching Network and a Comet cito Plus RF Generator.
High performance, high reliability and precise control of plasma processes at a competitive price.
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