Comet nominated for the Prix IFF
with Synertia® RFG

Comet has been selected as a finalist in the Enterprise category of the Prix IFF 2026–2027 – Innovation Fribourg Freiburg. We are proud to see Synertia® recognized as an innovation developed with strong expertise in the Canton of Fribourg and addressing the increasingly demanding requirements of semiconductor manufacturing.

Our nomination focuses on Synertia® RFG, Comet's RF Generator, and the broader Synertia® RF Power Delivery Platform. The platform combines RF generators and matching networks with high-speed communication, digital control, measurement and data analysis to enable a new level of coordinated plasma control.

As semiconductor processes move towards increasingly complex structures and process recipes, RF power delivery needs to provide not only accurate and repeatable power, but also the flexibility and responsiveness required for advanced plasma applications.

Synertia® addresses this through the close coordination of the RF Generator and Matching Network. High-speed communication allows both subsystems to respond to changing process conditions together, optimizing RF power delivery throughout the process. The platform supports continuous-wave, pulsed and multi-level pulsed operation, with precise optimization at individual process transitions. This coordinated architecture creates capabilities beyond those of the individual subsystems.

• Multi-level pulsing with independently configurable frequency tuning per level

• Precise pulse management, including pulse duration, duty cycle and rising/falling slopes

• Auto Frequency Tuning (AFT) across ±10% of nominal frequency to rapidly adapt to changing plasma conditions

• Rapid response to impedance changes and reduction of reflected power, including during multi-level pulsing

• Multiple arc-management detection methods, with arc detection and closed-loop power control designed to minimize wafer scrap
• Power accuracy of ±1% of setpoint across the power range
• Digital metrology and system control for advanced manufacturing applications
• High-speed communication and a broad range of interfaces for OEM-tool integration

A key differentiator of Synertia® is that RF power delivery is combined with extensive measurement and data capabilities.

The platform captures and analyzes large numbers of process parameters, enabling engineers to investigate events, identify process behavior and optimize recipes. Its integrated Measurement Studio provides advanced oscilloscope, frequency-analysis, Smith-chart and event-based data-logging functions, giving users direct access to critical RF and process parameters.

This digital layer helps shorten troubleshooting and process-development cycles. Instead of treating measurement and analysis as separate activities, Synertia® integrates them directly into the RF power delivery environment.

The ultimate benefit for semiconductor manufacturers is deeper process control: Faster response, accurate power delivery, optimized matching, sophisticated pulsing and real-time measurement all contribute to stable and repeatable plasma conditions. This can help improve wafer-level uniformity, accelerate process optimization, reduce downtime and increase yield.

For advanced applications, Synertia® also enables more sophisticated control strategies. Multi-level pulsing, for example, allows different RF conditions to be defined within a single process sequence, while Auto Frequency Tuning helps maintain efficient power transfer as process conditions change. Together with the platform's data capabilities, these functions give engineers more tools to develop, understand and optimize demanding plasma processes.

Synertia® represents an important step in Comet's evolution from individual RF components towards an integrated RF power delivery solution. To develop Synertia®, Comet built a dedicated team combining RF, software and system expertise. The result is not simply a new RF Generator, but a platform in which RF power generation, matching, measurement, communication and digital control work together.

The technology is supported by Comet's semiconductor-focused development, testing and qualification infrastructure, including high-power RF smartLABs for prototyping, in-the-loop testing and data-driven design verification.

The Prix IFF – Innovation Fribourg Freiburg recognizes innovative companies and projects from the Canton of Fribourg. For Comet, being selected as a finalist is a recognition of the technology and the people behind Synertia®.

The award ceremony will take place in Fribourg on November 11, 2026, when the winners of the Prix IFF 2026 will be announced.