Powerful X-ray and CT inspection systems
Comet Yxlon offers a wide range of state-of-the-art X-ray and CT systems designed to support all industrial inspection needs in the manufacturing industry. Specialized systems are used in a variety of fields including aerospace, automotive, electronics, and science and research. Whether your components are measured in micrometers or meters, ounces or pounds, there is a Comet Yxlon system to match. Many systems can be integrated directly into production lines to optimize production time and processes.
CA20
Designed to provide superior 2D and 3D images at the highest resolution, the CA20 enables the fastest inspection of micron-sized details and shortens time to market for complex 3D ICs.
CA20 Features
- Designed for the Semiconductor Industry
- Non-destructive technology for 3D identification of solder bumps in a matter of minutes
- Reproducible results with reliable and accurate technology designed to support stable inspection routines
- Efficient software-assisted review, including automated void analysis with Void Insights
- Dose Manager to protect X-ray sensitive components
Technical Data
| Application/Version | MXI / Lab | AXI / Fab |
| Max. inspection envelope | 435 mm (17") | 435 mm (17") |
| System Dimensions (W/D/H) | 1650 x 1400 x 2050 mm | 1955 x 3100 x 2200 mm* |
| System Weight | ~ 2350 kg | ~ 3650 kg |
| Detector Active Area | 130 x 130 mm | 130 x 130 mm |
| Pixel Matrix | 1536 x 1536 px | 1536 x 1536 px |
| Pixel Pitch | 85 µm | 85 µm |
| Oblique Viewing | +/- 65° (130°) | +/- 65° (130°) |
| Max. part weight | 1 - 2 kg** | 0.5 kg*** |
| Scan Modes | 2D, 2.5D, 3D | 2D, 2.5D, 3D |
*Depending on fan filter unit / cleanroom class. **Max. part weight: 1 kg (on carbon plate), 2 kg (on part holder if fixed on the table side). ***Accumulated weight of all parts incl. weight of carrier
CC Series
Introducing the Cheetah EVO and Cougar EVO, microfocus inspection systems designed to meet the demands of Industry 4.0: the Cheetah EVO excels in SMT, semiconductor, and lab inspection, while the Cougar EVO provides precise and reliable industrial inspection.
Cheetah EVO Features
- Fast and reproducible inspection
- Automatic calculation of voids with VoidInspect
- Easy-to-use powerful filters such as eHDR
- Best laminography with micro3Dslice and FF CT software
- Low dose detector mode for dose reduction kits, dose monitoring and sensitive parts
- Optional new water-cooled X-ray tube for stable focus position
- Optional high load capacity (<20 kg)
Technical Data
| Sample Size | 800 x 500 [mm] (31'' x 19'') |
| Max. Radioscopic Area | 460 x 410 [mm] (18'' x 16'') |
| System Dimensions (W/D/H) | 1650 x 1400 x 2050 [mm] |
| System Weight | 2200 kg |
| FeinFocus X-ray Tube | FXT-160.50 Microfocus or FXT-160.51 Multifocus, 20 - 160 kV voltage range |
| Pixel Matrix | 1004 x 620 px (Flat-panel detector 1308), 1004 x 1004 px (Flat-panel detector 1313), 1276 x 1276 px (Flat-panel detector 1616) |
| Pixel Pitch | 127 µm |
| Bit Depth | 16 bit |
| Oblique Viewing | +/- 70° (140°) |
| 3D Modes | Laminography (micro3Dslice), CT QuickScan, QualityScan |
Cougar EVO Features
- Reliable, fast, reproducible inspections with manual and automatic operation
- Automatic void calculation with VoidInspect
- Easy to use, dynamic enhancing filters, e.g., eHDR
- Best laminography with micro 3D slices and FF CT software
- Dose reduction kit and low-dose detector mode allow imaging of sensitive components
Smallest footprint
Technical Data
| Sample Size | 440 x 550 [mm] (17'' x 21'') |
| Max. Radioscopic Area | 310 x 310 [mm] (12'' x 12'') |
| System Dimensions (W/D/H) | 1000 x 1050 x 2200 [mm] |
| System Weight | 1450 kg |
| FeinFocus X-ray Tube | FXT-160.50 Microfocus or FXT-160.51 Multifocus, 20 - 160 kV voltage range |
| Pixel Matrix | 1004 x 620 px (Flat-panel detector 1308), 1004 x 1004 px (Flat-panel detector 1313), 1276 x 1276 px (Flat-panel detector 1616) |
| Pixel Pitch | 127 µm |
| Bit Depth | 16 bit |
| Oblique Viewing | +/- 70° (140°) |
| 3D Modes | Laminography (micro3Dslice), CT QuickScan, QualityScan |
UX Series
The UX50 and UX20 are advanced mini-focus and meso-focus inspection systems that deliver outstanding performance: the UX50 features a large inspection envelope, multiple extended fields of view, and a powerful 450 kV X-ray tube, making it ideal for inspecting complex, high-density parts; the UX20 offers intuitive operation, allowing users with all levels of expertise to perform X-ray and CT inspections efficiently and quickly in manual, assisted, and automatic modes.
UX50 Features
- High power 450 kV X-ray tube
- Can be equipped with either a line detector or a flat panel detector
- Intuitive user interface
- Compliant with international standards in 2D/3D
- Compact design
- Suitable for applications such as automotive, metal casting, and additive manufacturing
Technical Data
| Sample Diameter | 600 [mm] |
| Sample Height | 850 [mm] Flat-Panel Detector / 800 [mm] Line Detector |
| System Dimensions (W/D/H) | 2,620 x 1,945 x 2,560 [mm] Flat-Panel Detector / 2,620 x 2,585 x 2,775 [mm] Line Detector |
| Maximum Sample Weight | 100 [kg] |
| X-ray Tube | 450 kV mini-focus |
| Detector Type | Flat-panel detector 4343 N and/or Comet Yxlon line detector CTScan 3 |
| CT Modes | Cone-beam CT, QuickScan, QualityScan, HeliExtend, SpeedMode, Fan-beam CT, ScanExtend (FoV extensions), Volume Crop |
| Voxel Size | Down to 55 [µm] |
| Inspection Envelope CT (3D) with Flat-Panel Detector | 570 x 850 [mm] |
| Inspection Envelope CT (3D) with Line Detector | 600 x 800 [mm] |
| Inspection Envelope DR (2D) | 520 x 850 [mm] |
| Manipulation | 5 axes |
UX20 Features
- Field-proven ADR software for casting
- Benchmark high image quality
- Fast 2D and 3D inspection
- Optional meso-focus X-ray tube 225 kV
- Image optimization with Scatter Fix (anti-scattering) 2.0
- Automated data transfer
- Smart Guard (collision prevention)
- Compact footprint
- Robust design
Technical Data
| Configuration | Flat-panel detector 2323 HB | Flat-panel detector 4343 DXi |
| Maximum Sample Weight | 100 [kg] | 100 [kg] |
| System Dimensions (W/D/H) | 2250 x 1770 x 2350 [mm] | 2250 x 1770 x 2350 [mm] |
| Available X-ray Tubes | 160-225 [kV] mini-focus, 225 kV MesoFocus | 160-225 [kV] mini-focus, 225 kV MesoFocus |
| Detector Active Area | 1280 x 1280 [px] | 3072 x 3072 [px] |
| Pixel Pitch | 179 [µm] | 139 [µm] |
| Oblique Viewing | +/-55 (45° in central beam) | +/-55 (45° in central beam) |
| CT Modes | Cone-beam CT, QuickScan, QualityScan, FlexCenter (virtual rotation axis), ZoomScan, SpeedMode, ScanExtend (FoV extensions) | Cone-beam CT, QuickScan, QualityScan, FlexCenter (virtual rotation axis), ZoomScan, SpeedMode, ScanExtend (FoV extensions) |
| Inspection Envelope DR (2D) | 710 x 1090 [mm] | 800 x 1100 [mm] |
| Inspection Envelope CT (3D) | 190 x 165 [mm] | 340 x 280 [mm] |
| Inspection Envelope CT (3D) with ScanExtend | 315 x 1085 [mm] | 540 x 1100 [mm] |
| Manipulation | 5 axes | 5 axes |
FF Series
FF85 CT Features
- Two tubes, flat panel detector and line detector, for a wide range of applications from micro-CT to high-energy CT
- Versatile field of view extension, wide inspection range with helical and dual helical CT technology
- Granite base for optimal temperature environment and precise operation
- High versatility with up to 7 operating axes
- Intuitive Geminy user interface with touch screen for easy system operation
Technical Data
| Sample Diameter (1) | up to 1800 (mm) |
| Sample Height (1) | up to 3000 [mm] |
| Maximum Sample Weight (1) | 1000 [kg] |
| Focus-Detector-Distance (FDD) (2) | up to 3700 [mm] |
| Available X-ray Tubes | 600 kV Minifocus 450 kV Minifocus 450 kV Mesofocus 300 kV Microfocus 225 kV Microfocus 190 kV Nanofocus |
| Available X-ray Detector | Flat-panel detector Line detector array |
| Available CT Modes | Cone-beam CT, QuickScan, QualityScan, HeliExtend, FlexCenter (virtual rotation axis), ZoomScan, LayerScan, SpeedMode, Fan-beam CT, ScanExtend (FoV extensions), Volume crop |
| Manipulation | 7 axes, granite base |
(1) Depends on configuration chosen. This figure shows the configuration for extra-large parts
(2) Specification shown for minifocus & line detector
FF35 CT Features
- One- or two-tube configurations provide maximum versatility for laboratory micro-CT applications
- Switch between 225 kV microfocus tube and 190 kV nanofocus tube within seconds at the touch of a button
- Granite operation and air conditioning for accurate results
- Application flexibility through various CT trajectories and FoV extensions with the software platform Geminy
- Optional metrology version with MPESD = 5.9 µm + L/75 [L in mm
- FF35 CT SEMI version available in compliance with semiconductor market standards
- NEW! Maximum sample weight has been updated to 50 kg.
Technical Data
| Sample Diameter | 530 [mm] (20.9") |
| Sample Height | 800 [mm] (31.5") |
| Maximum Sample Weight | 50 [kg] |
| System Dimensions (W/D/H) | 2960 x 1590 x 2120 [mm] |
| X-ray Tube | Single or dual tube system including 160 kV Nano-focus tube or 190 kV transmission tube and 225 kV directional beam tube |
| Available CT Modes | Cone-beam CT, QuickScan, QualityScan, HeliExtend, FlexCenter (virtual rotation axis), ZoomScan, LayerScan, ScanExtend (FoV extensions), Volume crop |
| Manipulation | Granite base, active air damping, 6 to 8 axes, wide FDD range |
FF20 CT Features
- Accurate material analysis in laboratory applications
- 2-D detailed visibility down to 150 nm with 190 kV transmission tube
- Precise operation and temperature stability due to granite base
- Intuitive Geminy graphical user interface with touch screen
Technical Data
| Sample Diameter | 380 [mm] (11.02") |
| Sample Height | 700 [mm] (27.6") |
| Maximum Sample Weight | 17 [kg] |
| System Dimensions (W/D/H) | 2380 x 945 x 2180 [mm] |
| X-ray Tube | 190 kV transmission tube |
| Available CT Modes | Cone-beam CT, QuickScan, QualityScan, HeliExtend, FlexCenter (virtual rotations axis), ZoomScan, LayerScan, SpeedMode, ScanExtend (FoV extensions), Volume crop |
| Manipulation | Granite base, active air damping, 6 axes, wide FDD range |
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